KUKA develops mobile robot for semiconductor production

The application consists of a standardised automated guided vehicle (AGV) and a service LBR iiwa lightweight robot.

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Kuka
The mobile robotic solution for the semiconductor industry moves autonomously.

Semiconductors are small and smart computer chips that can be used in everyday life – from smart-phones, tablets to cars. The chemical element used in the production of semiconductors is silicon and is processed in the form of wafers. The demand for semiconductors is set to increase and manufacturers wish to automate the process still further. KUKA has developed the world’s first solution from a single source for the automated transfer and handling of semiconductor cassettes. The application consists of a standardised automated guided vehicle (AGV) and a service LBR iiwa lightweight robot.

Additionally, a sophisticated gripper system has been developed. Mobility is provided by the KMR 200 CR mobile platform. The platform has Mecanum wheels that has a multi-directional motion. Sensors on the platform assess the environment in real-time thereby avoiding collisions. The human-robot LBR iiwa is installed on the platform. The sensitivity of the robot enables it to handle the sensitive wafer cassettes safely and without vibrations. The third component of the application is a customized gripper. All solutions are from a single source and are certified. This results in extremely short commissioning times – making the system the most flexible handling system on the market.

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